Gomaringen
Germany
5
2011-05-12
The entities that hold a legal rights for patent applications filed by inventor Baumann Helmut:
Helmut Baumann from Gomaringen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Micromechanical Capacitive Sensor Element
#2 | 2011-01-20Device made of single-crystal silicon
#3 | 2009-01-08Device made of single-crystal silicon
#4 | 2005-10-20Sensor with at least one micromechanical structure, and method for producing it
#5 | 2005-08-30Sensor with at least one micromechanical structure and method for production thereof
3378884 ⎘