Austin, Texas
United States
3
2011-07-14
The entities that hold a legal rights for patent applications filed by inventor Kirlin Peter S.:
Peter S. Kirlin from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition
#2 | 2008-01-29Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition
#3 | 2005-01-25Plasma-assisted dry etching of noble metal-based materials
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