Sam X. Sun

City:

Rolla, Missouri

Country:

United States

Published Applications:

Last publication date:

2011-09-15

Top Assignees for applications by Sam X. Sun

The entities that hold a legal rights for patent applications filed by inventor Sun Sam X.:

Sam X. Sun from Rolla, US has applied for patents for these inventions. The list has both pending applications and granted patents:

On-track process for patterning hardmask by multiple dark field exposures

On-track process for patterning hardmask by multiple dark field exposures

Method of creating photolithographic structures with developer-trimmed hard mask

Wet developable hard mask in conjunction with thin photoresist for micro photolithography

InventorID:

3437405 ⎘