Essingen
Germany
9
2011-09-29
The entities that hold a legal rights for patent applications filed by inventor Merz Erich:
Erich Merz from Essingen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Positioning method for an optical arrangement of a projection illumination system
#2 | 2011-08-18Imaging device in a projection exposure facility
#3 | 2009-06-04Imaging Device in a Projection Exposure Machine
#4 | 2009-02-12Imaging device in a projection exposure facility
#5 | 2008-12-25Optical assembly, projection exposure apparatus and projection objective
#6 | 2008-07-24Imaging device in a projection exposure machine
#7 | 2007-12-04Imaging device in a projection exposure facility
#8 | 2006-10-12Optical imaging device
#9 | 2006-07-27Imaging device in a projection exposure machine
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