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Inventor profile of:

Erich Merz

City:

Essingen

Country:

Germany

Published Applications:

9

Last publication date:

2011-09-29

Top Assignees for applications by Erich Merz

The entities that hold a legal rights for patent applications filed by inventor Merz Erich:

  • CARL ZEISS SMT AG 6 Oberkochen, Germany
  • Carl Zeiss SMT GmbH 3 Oberkochen, Germany
  • Carl Zelss SMT AG 1 Oberkochen, Germany

Recent patent applications by Merz Erich

Erich Merz from Essingen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2011-09-29
US20110235005A1
Physics

Positioning method for an optical arrangement of a projection illumination system

#2 | 2011-08-18
US20110199597A1
Physics

Imaging device in a projection exposure facility

#3 | 2009-06-04
US20090141258A1
Physics

Imaging Device in a Projection Exposure Machine

#4 | 2009-02-12
US20090040487A1
Physics

Imaging device in a projection exposure facility

#5 | 2008-12-25
US20080316621A1
Physics

Optical assembly, projection exposure apparatus and projection objective

#6 | 2008-07-24
US20080174757A1
Physics

Imaging device in a projection exposure machine

#7 | 2007-12-04
US10250495
-

Imaging device in a projection exposure facility

#8 | 2006-10-12
US20060230413A1
Physics

Optical imaging device

#9 | 2006-07-27
US20060164619A1
Physics

Imaging device in a projection exposure machine

InventorID:

3446357 ⎘

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