Aalen
Germany
4
2011-09-29
The entities that hold a legal rights for patent applications filed by inventor SCHMIDT Stefan:
Stefan SCHMIDT from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for examining a wafer with regard to a contamination limit and EUV projection exposure system
#2 | 2011-03-10CLEANING MODULE AND EUV LITHOGRAPHY DEVICE WITH CLEANING MODULE
#3 | 2010-07-22Method for examining a wafer with regard to a contamination limit and EUV projection exposure system
#4 | 2010-03-25METHOD AND SYSTEM FOR REMOVING CONTAMINANTS FROM A SURFACE
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