Chemnitz
Germany
4
2011-09-29
The entities that hold a legal rights for patent applications filed by inventor Kiesel Axel:
Axel Kiesel from Chemnitz, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and system for controlling chemical mechanical polishing by controllably moving a slurry outlet
#2 | 2010-07-01Electrochemical planarization system comprising enhanced electrolyte flow
#3 | 2008-10-02CMP SYSTEM HAVING AN EDDY CURRENT SENSOR OF REDUCED HEIGHT
#4 | 2008-06-05Method and system for controlling chemical mechanical polishing by controllably moving a slurry outlet
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