Tokyo
Japan
2
2013-07-18
The entities that hold a legal rights for patent applications filed by inventor Kitade Yuko:
Yuko Kitade from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
POLISHING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE EMPLOYING THIS POLISHING APPARATUS, AND SEMICONDUCTOR DEVICE MANUFACTURED BY THIS METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#2 | 2006-03-02CMP polishing method and method for manufacturing semiconductor device
345102 ⎘