Cupertino, California
United States
11
2016-06-09
The entities that hold a legal rights for patent applications filed by inventor Long Maolin:
Maolin Long from Cupertino, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Faraday Shield Having Plasma Density Decoupling Structure Between TCP Coil Zones
#2 | 2015-08-20TCCT match circuit for plasma etch chambers
#3 | 2014-12-18Hammerhead TCP coil support for high RF power conductor etch systems
#4 | 2013-07-25Faraday shield having plasma density decoupling structure between TCP coil zones
#5 | 2013-05-30TCCT match circuit for plasma etch chambers
#6 | 2012-12-20Powered grid for plasma chamber
#7 | 2012-11-01Internal Faraday shield having distributed chevron patterns and correlated positioning relative to external inner and outer TCP coil
#8 | 2012-08-30Plasma processing systems including side coils and methods related to the plasma processing systems
#9 | 2012-02-09Radio frequency (RF) power filters and plasma processing systems including RF power filters
#10 | 2011-05-19Current control in plasma processing systems
#11 | 2010-12-16Adjusting current ratios in inductively coupled plasma processing systems
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