Dublin, California
United States
19
2020-09-10
The entities that hold a legal rights for patent applications filed by inventor Wu Ying:
Ying Wu from Dublin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Frequency tuning for a matchless plasma source
#2 | 2019-09-19Frequency tuning for a matchless plasma source
#3 | 2018-07-19Near-substrate supplemental plasma density generation with low bias voltage within inductively coupled plasma processing chamber
#4 | 2018-03-29Methods and systems for advanced ion control for etching processes
#5 | 2018-03-15Methods and systems for advanced ion control for etching processes
#6 | 2018-01-04Methods and Systems for Independent Control of Radical Density, Ion Density, and Ion Energy in Pulsed Plasma Semiconductor Device Fabrication
#7 | 2017-12-28Systems for reverse pulsing
#8 | 2017-09-21Methods and systems for plasma etching using bi-modal process gas composition responsive to plasma power level
#9 | 2017-08-10Atomic layer etching in continuous plasma
#10 | 2017-05-04Methods and systems for advanced ion control for etching processes
#11 | 2017-05-04Methods and systems for plasma etching using bi-modal process gas composition responsive to plasma power level
#12 | 2017-05-04Methods and systems for independent control of radical density, ion density, and ion energy in pulsed plasma semiconductor device fabrication
#13 | 2017-04-06Electrostatic chuck with thermal choke
#14 | 2017-02-09Systems and methods for reverse pulsing
#15 | 2017-02-09Systems and methods for reverse pulsing
#16 | 2016-06-09Faraday Shield Having Plasma Density Decoupling Structure Between TCP Coil Zones
#17 | 2014-10-09INTERNAL PLASMA GRID FOR SEMICONDUCTOR FABRICATION
#18 | 2013-07-25Faraday shield having plasma density decoupling structure between TCP coil zones
#19 | 2012-12-20Powered grid for plasma chamber
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