Ulm
Germany
5
2011-08-02
The entities that hold a legal rights for patent applications filed by inventor Tayebati Payam:
Payam Tayebati from Ulm, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Projection objective of a microlithographic projection exposure apparatus
#2 | 2011-04-07Optical element and method
#3 | 2009-10-15Optical element and method
#4 | 2009-05-28Optical imaging device with thermal attenuation
#5 | 2008-10-02Projection objective of a microlithographic projection exposure apparatus
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