Gerd Klose

City:

Oberkochen

Country:

Germany

Published Applications:

Last publication date:

2010-09-23

Top Assignees for applications by Gerd Klose

The entities that hold a legal rights for patent applications filed by inventor Klose Gerd:

Gerd Klose from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Method for calibrating a specimen stage of a metrology system and metrology system comprising a specimen stage

Method and apparatus for determining the relative overlay shift of stacked layers

APPARATUS AND METHOD FOR MEASURING THE POSITIONS OF MARKS ON A MASK

Method and apparatus for determining the position of a structure on a carrier relative to a reference point of the carrier

Method and device for connecting an optical element to a frame

Device and method for range-resolved determination of scattered light, and an illumination mask

Device for the range-resolved determination of scattered light, operating method, illumination mask and image-field mask

InventorID:

3629738 ⎘