Dresden
Germany
8
2010-09-30
The entities that hold a legal rights for patent applications filed by inventor Raebiger Jan:
Jan Raebiger from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and apparatus for dispatching workpieces to tools based on processing and performance history
#2 | 2007-09-11Method and system for controlling the chemical mechanical polishing of substrates by calculating an overpolishing time and/or a polishing time of a final polishing step
#3 | 2006-08-31Method of operating an advanced process controller by dynamically adapting hierarchy levels
#4 | 2006-02-28Method and system for improving exposure uniformity in a step and repeat process
#5 | 2005-09-20Method and system for improving the efficiency of a mechanical alignment tool
#6 | 2005-09-01Method and system for controlling a product parameter of a circuit element
#7 | 2005-04-12Advanced process control for a manufacturing process of a plurality of products with minimized control degradation after re-initialization upon occurrence of reset events
#8 | 2005-03-03Technique for enhancing accuracy of critical dimensions of a gate electrode by using characteristics of an ARC layer
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