Eric O. Green

Method and apparatus for measuring performance of hierarchical test equipment

Method and apparatus for dynamically determining tester recipes

Determining the health of a desired node in a multi-level system

Method and apparatus for system state classification

Methods of controlling gate electrode doping, and systems for accomplishing same

Fault detection spanning multiple processes

Advanced process control of the manufacture of an oxide-nitride-oxide stack of a memory device, and system for accomplishing same

Determining a next tool state based on fault detection information

Updating process controller based upon fault detection analysis

Process control at an interconnect level