Tokyo
Japan
11
2010-11-25
The entities that hold a legal rights for patent applications filed by inventor IKEDA Masayoshi:
Masayoshi IKEDA from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Plasma processing apparatus
#2 | 2010-06-17High-Frequency Plasma Processing Apparatus
#3 | 2008-07-03Surface processing apparatus
#4 | 2008-03-06High-frequency plasma processing apparatus
#5 | 2008-03-06Surface Processing Apparatus
#6 | 2008-01-29High-frequency plasma processing apparatus
#7 | 2008-01-17Electro-Static Chucking Mechanism and Surface Processing Apparatus
#8 | 2007-05-22Electrostatic chucking stage and substrate processing apparatus
#9 | 2007-02-13Electrostatic chucking stage and substrate processing apparatus
#10 | 2006-03-14Brine supply unit
#11 | 2005-06-16Electrostatic chuck module and cooling system
3697919 ⎘