Castro Valley, California
United States
4
2010-01-28
The entities that hold a legal rights for patent applications filed by inventor KOEMTZOPOULOS C. Robert:
C. Robert KOEMTZOPOULOS from Castro Valley, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Process for wafer temperature verification in etch tools
#2 | 2008-09-16Method for hard mask CD trim
#3 | 2007-10-25Method for hard mask CD trim
#4 | 2005-09-22Dual doped polysilicon and silicon germanium etch
3744690 ⎘