Jena
Germany
3
2010-05-20
The entities that hold a legal rights for patent applications filed by inventor Boehm Michael:
Michael Boehm from Jena, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Aerostatically guided table system for vacuum application
#2 | 2010-03-11Aerostatic bearing arrangement and associated electrostatic preloading unit, particularly for vacuum application
#3 | 2009-10-15Table guided by aerostatic bearing elements for vacuum application
3764025 ⎘