Albrecht Ehrmann

City:

Koenigsbronn

Country:

Germany

Published Applications:

Last publication date:

2010-06-10

Top Assignees for applications by Albrecht Ehrmann

The entities that hold a legal rights for patent applications filed by inventor Ehrmann Albrecht:

CARL ZEISS SMT AG 6 Oberkochen, Germany
Carl Zeiss SMT GmbH 3 Oberkochen, Germany

Recent patent applications by Ehrmann Albrecht

Albrecht Ehrmann from Koenigsbronn, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2010-06-10

US20100141912A1

Physics

Exposure apparatus and measuring device for a projection lens

#2 | 2010-03-25

US20100073655A1

Physics

Optical system of a microlithographic projection exposure apparatus

#3 | 2009-10-15

US20090257049A1

Physics

Device and method for the optical measurement of an optical system by using an immersion fluid

#4 | 2009-01-22

US20090021726A1

Physics

DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM BY USING AN IMMERSION FLUID

#5 | 2008-12-18

US20080309904A1

Physics

OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

#6 | 2008-12-18

US20080309894A1

Physics

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS

#7 | 2007-03-29

US20070070316A1

Physics

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS

#8 | 2005-11-03

US20050243328A1

Physics

Device and method for the optical measurement of an optical system by using an immersion fluid

InventorID:

3768163 ⎘