Freising
Germany
3
2010-08-19
The entities that hold a legal rights for patent applications filed by inventor Schwekendiek Holger:
Holger Schwekendiek from Freising, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Apparatus and method for detecting defects in wafer manufacturing
#2 | 2008-01-03METHOD FOR IN-LINE MONITORING A LENS CONTROLLER OF A PHOTOLITHOGRAPHY SYSTEM
#3 | 2006-03-16Method of monitoring the light integrator of a photolithography system
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