Leuven
Belgium
11
2010-08-26
The entities that hold a legal rights for patent applications filed by inventor Dirksen Peter:
Peter Dirksen from Leuven, BE has applied for patents for these inventions. The list has both pending applications and granted patents:
METHODS AND DEVICES FOR CHARACTERIZING POLARIZATION OF ILLUMINATION SYSTEM
#2 | 2008-09-18Determining Image Blur in an Imaging System
#3 | 2007-06-14Lithography system using a programmable electro-wetting mask
#4 | 2007-05-10Lithographic projection device, method an substrate for manufacturing electronic devices, and obtained electronic device
#5 | 2007-03-22Removable pellicle for immersion lithography
#6 | 2006-09-28Method of measuring the performance of an illumination system
#7 | 2006-09-14Determning lithographic parameters to optimise a process window
#8 | 2006-07-20Lithographic method of manufacturing a device
#9 | 2006-05-02Lithographic method of manufacturing a device
#10 | 2005-11-01Method of measuring the performance of a scanning electron microscope
#11 | 2005-06-02Method of and system for determining the aberration of an imaging system test object and detector for use with the method
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