Utzmemmingen
Germany
19
2009-08-20
The entities that hold a legal rights for patent applications filed by inventor Melzer Frank:
Frank Melzer from Utzmemmingen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Optical system for semiconductor lithography
#2 | 2009-05-28OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY
#3 | 2009-01-01Apparatus for the manipulation and/or adjustment of an optical element
#4 | 2008-12-04Focusing-device for the radiation from a light source
#5 | 2008-08-12Focusing-device for the radiation from a light source
#6 | 2008-02-21Collector with fastening devices for fastening mirror shells
#7 | 2008-01-17Collector configured of mirror shells
#8 | 2007-01-25Facet mirrors and a method for producing mirror facets
#9 | 2006-12-28Collector with fastening devices for fastening mirror shells
#10 | 2006-12-14Optical apparatus comprising an optical component and an adjustment device and method for influencing a polarization state of the optical component
#11 | 2006-08-15Collector with fastening devices for fastening mirror shells
#12 | 2006-05-11Collector having unused region for illumination systems using a wavelength ≦193 nm
#13 | 2006-04-25Method of connecting a multiplicity of optical elements to a basic body
#14 | 2006-03-21Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm
#15 | 2005-08-11Lighting system, particularly for use in extreme ultraviolet (EUV) lithography
#16 | 2005-05-24System for damping oscillations
#17 | 2005-02-10Facet mirror having a number of mirror facets
#18 | 2005-02-10Facet mirror having a number of mirror facets
#19 | 2005-01-18Optical element deformation system
3843940 ⎘