Samarate
Italy
11
2014-06-05
The entities that hold a legal rights for patent applications filed by inventor ZOCCHI Fabio:
Fabio ZOCCHI from Samarate, IT has applied for patents for these inventions. The list has both pending applications and granted patents:
Source-collector module with GIC mirror and LPP EUV light source
#2 | 2013-08-15Source-collector modules for EUV lithography employing a GIC mirror and a LPP source
#3 | 2012-08-23Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography
#4 | 2012-03-01Source-collector module with GIC mirror and tin rod EUV LPP target system
#5 | 2012-03-01Source-collector module with GIC mirror and tin wire EUV LPP target system
#6 | 2012-03-01Source-collector module with GIC mirror and xenon ice EUV LPP target system
#7 | 2012-03-01Source-collector module with GIC mirror and xenon liquid EUV LPP target system
#8 | 2011-12-29Source-collector module with GIC mirror and tin vapor LPP target system
#9 | 2011-07-14Source-collector module with GIC mirror and LPP EUV light source
#10 | 2011-02-24Grazing incidence collector optical systems for EUV and X-ray applications
#11 | 2010-12-02Grazing incidence collector for laser produced plasma sources
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