Jena
Germany
3
2009-01-08
The entities that hold a legal rights for patent applications filed by inventor Feigl Torsten:
Torsten Feigl from Jena, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Thermally stable multilayer mirror for the EUV spectral range
#2 | 2008-04-17Thermally stable multilayer mirror for the EUV spectral region
#3 | 2005-06-16Monochromator mirror for the EUV-spectral range
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