Oberkochen
Germany
2
2009-01-15
The entities that hold a legal rights for patent applications filed by inventor Mueller Ulrich:
Ulrich Mueller from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
DETECTOR FOR REGISTERING A LIGHT INTENSITY, AND ILLUMINATION SYSTEM EQUIPPED WITH THE DETECTOR
#2 | 2008-06-05PROJECTION EXPOSURE TOOL FOR MICROLITHOGRAPHY HAVING A RADIATION DETECTOR FOR SPATIALLY RESOLVED REGISTRATION OF ELECTROMAGNETIC RADIATION
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