Uwe Spengler

City:

Trochtelfingen

Country:

Germany

Published Applications:

Last publication date:

2009-01-22

Top Assignees for applications by Uwe Spengler

The entities that hold a legal rights for patent applications filed by inventor Spengler Uwe:

Carl Zeiss SMT GmbH 1 Oberkochen, Germany
CARL ZEISS SMT AG 1 Oberkochen, Germany

Recent patent applications by Spengler Uwe

Uwe Spengler from Trochtelfingen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2009-01-22

US20090021716A1

Physics

Illumination system for a microlithographic projection exposure apparatus

InventorID:

3861153 ⎘