Austin, Texas
United States
8
2009-01-22
The entities that hold a legal rights for patent applications filed by inventor Bottema Brian E.:
Brian E. Bottema from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Process of using a polishing apparatus including a platen window and a polishing pad
#2 | 2007-09-27Polishing pad, a polishing apparatus, and a process for using the polishing pad
#3 | 2007-03-08Platen endpoint window with pressure relief
#4 | 2007-03-08Grooved platen with channels or pathway to ambient air
#5 | 2007-02-20Polishing pad, a polishing apparatus, and a process for using the polishing pad
#6 | 2006-07-11Polishing carrier head with a modified pressure profile
#7 | 2005-06-14Polishing system having a carrier head with substrate presence sensing
#8 | 2005-05-03Chemical mechanical polish (CMP) conditioning-disk holder
3862619 ⎘