Lohmen
Germany
2
2009-02-05
The entities that hold a legal rights for patent applications filed by inventor Zimmerhackl Olaf:
Olaf Zimmerhackl from Lohmen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and system for locally buffering substrate carriers in an overhead transport system for enhancing input/output capabilities of process tools
#2 | 2009-02-05Two-dimensional transfer station used as interface between a process tool and a transport system and a method of operating the same
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