Bernd Schulz

City:

Radebeul

Country:

Germany

Published Applications:

Last publication date:

2009-04-02

Top Assignees for applications by Bernd Schulz

The entities that hold a legal rights for patent applications filed by inventor Schulz Bernd:

Bernd Schulz from Radebeul, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Structure and method for determining an overlay accuracy

METHOD AND APPARATUS FOR GENERATING METROLOGY TAGS TO ALLOW AUTOMATIC METROLOGY RECIPE GENERATION

Method and system for reducing overlay errors within exposure fields by APC control strategies

Structure and method for simultaneously determining an overlay accuracy and pattern placement error

Two-dimensional structure for determining an overlay accuracy by means of scatterometry

InventorID:

3912652 ⎘