Jin Nishikawa

City:

Tokyo

Country:

Japan

Published Applications:

Last publication date:

2009-07-30

Top Assignees for applications by Jin Nishikawa

The entities that hold a legal rights for patent applications filed by inventor Nishikawa Jin:

Jin Nishikawa from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Exposure apparatus, manufacturing method and supporting method thereof

Illumination optical apparatus, exposure apparatus, and method for producing device

Illumination optical apparatus, exposure apparatus, and method for producing device

COOLING APPARATUS FOR OPTICAL MEMBER, BARREL, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

Optical member-holding apparatus, method for adjusting position of optical member, and exposure apparatus

InventorID:

3928697 ⎘