Round Rock, Texas
United States
12
2009-05-14
The entities that hold a legal rights for patent applications filed by inventor Robbins Michael D.:
Michael D. Robbins from Round Rock, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Apparatus and Method for Wafer Edge Exclusion Measurement
#2 | 2009-05-07Apparatus and Method for Wafer Edge Defects Detection
#3 | 2008-08-14Wafer processing apparatus and method
#4 | 2008-02-07Automatic wafer edge inspection and review system
#5 | 2008-01-24Clean ignition system for wafer substrate processing
#6 | 2008-01-17Processing chamber having labyrinth seal
#7 | 2008-01-17Method and apparatus for cleaning a wafer substrate
#8 | 2008-01-17Apparatus for cleaning a wafer substrate
#9 | 2007-11-08Substrate illumination and inspection system
#10 | 2007-03-22Substrate processing method and apparatus using a combustion flame
#11 | 2007-03-22Method and apparatus for isolative substrate edge area processing
#12 | 2005-09-22Method for shaping thin films in the near-edge regions of in-process semiconductor substrates
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