Toride
Japan
15
2009-05-14
The entities that hold a legal rights for patent applications filed by inventor Masuda Toshio:
Toshio Masuda from Toride, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Disturbance-Free, Recipe-Controlled Plasma Processing System And Method
#2 | 2008-01-17Plasma processing system and apparatus and a sample processing method
#3 | 2007-08-23Disturbance-free, recipe-controlled plasma processing system and method
#4 | 2007-01-30Plasma processing system and apparatus and a sample processing method
#5 | 2006-12-12Plasma processing method
#6 | 2006-12-12Plasma processing apparatus and plasma processing method
#7 | 2006-09-21System for monitoring and controlling a semiconductor manufacturing apparatus using prediction model equation
#8 | 2006-09-07Data processing apparatus for semiconductor processing apparatus
#9 | 2006-06-15Disturbance-free, recipe-controlled plasma processing system and method
#10 | 2006-06-13Maintenance method and system for plasma processing apparatus
#11 | 2006-05-23Plasma processing apparatus and a plasma processing method
#12 | 2005-08-02Plasma processing system and apparatus and a sample processing method
#13 | 2005-04-28Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor
#14 | 2005-04-19Disturbance-free, recipe-controlled plasma processing method
#15 | 2005-02-03Disturbance-free, recipe-controlled plasma processing system and method
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