Theodoros Panagopoulos

City:

Country:

United States

Published Applications:

Last publication date:

2009-06-04

Recent patent applications by Panagopoulos Theodoros

Theodoros Panagopoulos from , US has applied for patents for these inventions. The list has both pending applications and granted patents:

Multiple frequency pulsing of multiple coil source to control plasma ion density radial distribution

Method of processing a workpiece using a mid-chamber gas distribution plate, tuned plasma flow control grid and electrode

Mid-chamber gas distribution plate, tuned plasma flow control grid and electrode

Plasma etch process for controlling line edge roughness

InventorID:

3957956 ⎘