Plano, Texas
United States
3
2009-06-11
The entities that hold a legal rights for patent applications filed by inventor Soper Robert:
Robert Soper from Plano, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Sub-resolution assist feature to improve symmetry for contact hole lithography
#2 | 2007-04-12Using a center pole illumination scheme to improve symmetry for contact hole lithography
#3 | 2007-02-15Sub-resolution assist feature to improve symmetry for contact hole lithography
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