Andrei M. Shkel

WAFER-LEVEL FABRICATION PROCESSES FOR FERRIMAGNETIC RESONATORS AND RESONATOR DEVICES

LASER MICROMACHINING OF MEMS RESONATORS FROM BULK OPTICALLY TRANSPARENT MATERIAL

FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION

Methods and systems for adaptive pedestrian inertial navigation

Fused quartz dual shell resonator and method of fabrication

Method of fabricating micro-glassblown gyroscopes

Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation

Fully balanced micro-machined inertial sensor

Axi-symmetric small-footprint gyroscope with interchangeable whole-angle and rate operation

Utilization of mechanical quadrature in silicon MEMS vibratory gyroscope to increase and expand the long term in-run bias stability

Lever mechanisms for anti-phase mode isolation in MEMS tuning-fork structures

Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation

Microfabrication of high quality three dimensional structures using wafer-level glassblowing of fused quartz and ultra low expansion glasses

Method for batch fabrication of three-dimensional shells

Three-dimensional wafer-scale batch-micromachined sensor and method of fabrication for the same

Self-inflated micro-glass blowing

Apparatus and method using capacitive detection with inherent self-calibration

Assembly process for out-of-plane MEMS and three-axis sensors

Single-mask fabrication process for linear and angular piezoresistive accelerometers

Method and apparatus for wafer-level micro-glass-blowing

Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator

Distributed-mass micromachined gyroscopes operated with drive-mode bandwidth enhancement

Post-release capacitance enhancement in micromachined devices and a method of performing the same

Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object

Nonresonant micromachined gyroscopes with structural mode-decoupling

Multi stage control architecture for error suppression in micromachined gyroscopes

Dynamically amplified micromachined vibratory angle measuring gyroscopes, micromachined inertial sensors and method of operation for the same

Method of simultaneously and directly generating an angular position and angular velocity measurement in a micromachined gyroscope

Non-resonant four degrees-of-freedom micromachined gyroscope