Los Altos, California
United States
8
2009-08-27
The entities that hold a legal rights for patent applications filed by inventor Steger Robert:
Robert Steger from Los Altos, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for controlling spatial temperature distribution across a semiconductor wafer
#2 | 2006-11-30Smart component-based management techniques in a substrate processing system
#3 | 2006-03-02Smart component-based management techniques in a substrate processing system
#4 | 2005-09-29Method and apparatus for controlling spatial temperature distribution
#5 | 2005-08-11Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support
#6 | 2005-08-11Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support
#7 | 2005-02-10System and method for integrated multi-use optical alignment
#8 | 2005-01-25Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support
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