Changwon-si
South Korea
8
2009-09-17
The entities that hold a legal rights for patent applications filed by inventor Bae Do-In:
Do-In Bae from Changwon-si, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same
#2 | 2007-08-16Wafer aligning apparatus and related method
#3 | 2007-04-05Ion source element, ion implanter having the same and method of modifying the same
#4 | 2007-03-20Method for generating gas plasma
#5 | 2006-08-03Apparatus for catching byproducts in semiconductor device fabrication equipment
#6 | 2006-04-20Apparatus for generating gas plasma, gas composition for generating plasma and method for manufacturing semiconductor device using the same
#7 | 2005-05-19Electrostatic chuck for supporting a substrate
#8 | 2005-02-03Chemical vapor deposition processing equipment for use in fabricating a semiconductor device
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