Ibaraki
Japan
4
2009-09-17
The entities that hold a legal rights for patent applications filed by inventor Tsukada Eri:
Eri Tsukada from Ibaraki, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of forming silicon oxide containing films
#2 | 2007-08-16Method for forming dielectric or metallic films
#3 | 2007-07-12Method for producing silicon nitride films and silicon oxynitride films by chemical vapor deposition
#4 | 2005-03-03Method for the fabrication of silicon nitride, silicon oxynitride, and silicon oxide films by chemical vapor deposition
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