Dublin, California
United States
13
2009-10-15
The entities that hold a legal rights for patent applications filed by inventor SMALL Robert J.:
Robert J. SMALL from Dublin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Compositions for chemical-mechanical planarization of noble-metal-featured substrates, associated methods, and substrates produced by such methods
#2 | 2009-04-28Compositions of chemical mechanical planarization slurries contacting noble-metal-featured substrates
#3 | 2007-10-02Chemical mechanical polishing composition and process
#4 | 2007-06-14Methods for chemically treating a substrate using foam technology
#5 | 2006-04-25Chemical mechanical polishing composition and process
#6 | 2006-03-21Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same
#7 | 2005-12-01Chemical mechanical polishing composition and process
#8 | 2005-11-10Compositions for chemical mechanical planarization of tantalum and tantalum nitride
#9 | 2005-09-15Compositions for cleaning organic and plasma etched residues for semiconductor devices
#10 | 2005-07-12Sulfoxide pyrolid(in)one alkanolamine cleaner composition
#11 | 2005-04-28CMP method for copper, tungsten, titanium, polysilicon, and other substrates using organosulfonic acids as oxidizers
#12 | 2005-03-15Compositions for chemical mechanical planarization of copper
#13 | 2005-02-08Composition for cleaning chemical mechanical planarization apparatus
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