Gyeonggi-do
South Korea
7
2009-10-22
The entities that hold a legal rights for patent applications filed by inventor Hata Mitsuhiro:
Mitsuhiro Hata from Gyeonggi-do, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
Mask patterns including gel layers for semiconductor device fabrication
#2 | 2008-07-24Mask patterns for semiconductor device fabrication and related methods and structures
#3 | 2006-12-07Top coating composition for photoresist and method of forming photoresist pattern using the same
#4 | 2006-06-15Double photolithography methods with reduced intermixing of solvents
#5 | 2006-05-25Top coating composition for photoresist and method of forming photoresist pattern using same
#6 | 2006-03-23Mask patterns for semiconductor device fabrication and related methods
#7 | 2006-03-23Mask patterns including gel layers for semiconductor device fabrication and methods of forming the same
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