Jun SONOBE

City:

Tsukuba

Country:

Japan

Published Applications:

Last publication date:

2014-09-04

Top Assignees for applications by Jun SONOBE

The entities that hold a legal rights for patent applications filed by inventor SONOBE Jun:

Jun SONOBE from Tsukuba, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium

METHOD OF CLEANING A FILM-FORMING APPARATUS

Low pressure acetylene storage

Method of cleaning a film-forming apparatus

InventorID:

408010 ⎘