Iruma
Japan
14
2009-12-31
The entities that hold a legal rights for patent applications filed by inventor Ono Tetsuo:
Tetsuo Ono from Iruma, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of semiconductor processing
#2 | 2008-01-24Semiconductor fabricating apparatus with function of determining etching processing state
#3 | 2007-08-21Sample surface processing method
#4 | 2007-08-09Plasma processing method and plasma processing apparatus
#5 | 2007-08-02Plasma processing apparatus and plasma processing method
#6 | 2006-05-23Surface processing method of a specimen and surface processing apparatus of the specimen
#7 | 2006-04-13Semiconductor fabricating apparatus with function of determining etching processing state
#8 | 2006-01-05Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units
#9 | 2005-12-06Semiconductor fabricating apparatus with function of determining etching processing state
#10 | 2005-11-22Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units
#11 | 2005-08-25Plasma processing method and plasma processing apparatus
#12 | 2005-06-23Plasma processing apparatus and plasma processing method
#13 | 2005-05-03Plasma processing method and plasma processing apparatus
#14 | 2005-02-01Method and apparatus for treating surface of semiconductor
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