Inventor profile of:

Klaus Hempel

City:

Dresden

Country:

Germany

Published Applications:

26

Last publication date:

2017-11-02

Top Assignees for applications by Klaus Hempel

The entities that hold a legal rights for patent applications filed by inventor Hempel Klaus:

Recent patent applications by Hempel Klaus

Klaus Hempel from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2017-11-02
US20170316944A1
Electricity

Short-channel NFET device

#2 | 2016-09-29
US20160284549A1
Electricity

Short-channel nFET device

#3 | 2016-06-16
US20160172251A1
Electricity

Integrated circuits and methods of forming the same with effective dummy gate cap removal

#4 | 2013-11-14
US20130302974A1
Electricity

REPLACEMENT GATE ELECTRODE FILL AT REDUCED TEMPERATURES

#5 | 2013-10-17
US20130273729A1
Electricity

Method for making high-K metal gate electrode structures by separate removal of placeholder materials

#6 | 2013-08-22
US20130217221A1
Electricity

Dry etch polysilicon removal for replacement gates

#7 | 2013-07-04
US20130168773A1
Electricity

High-k metal gate electrode structure formed by removing a work function on sidewalls in replacement gate technology

#8 | 2013-05-02
US20130109166A1
Electricity

Methods for fabricating integrated circuits with controlled P-channel threshold voltage

#9 | 2013-01-17
US20130017679A1
Electricity

Work function adjustment in high-K metal gate electrode structures by selectively removing a barrier layer

#10 | 2012-12-20
US20120319205A1
Electricity

High-k metal gate electrode structures formed by reducing a gate fill aspect ratio in replacement gate technology

#11 | 2012-12-13
US20120315749A1
Electricity

Metal gate stack formation for replacement gate technology

#12 | 2012-11-08
US20120282764A1
Electricity

Technique for exposing a placeholder material in a replacement gate approach by modifying a removal rate of stressed dielectric overlayers

#13 | 2012-10-18
US20120261765A1
Electricity

High-k metal gate electrode structures formed by separate removal of placeholder materials using a masking regime prior to gate patterning

#14 | 2012-09-20
US20120238086A1
Electricity

REDUCING EQUIVALENT THICKNESS OF HIGH-K DIELECTRICS IN FIELD EFFECT TRANSISTORS BY PERFORMING A LOW TEMPERATURE ANNEAL

#15 | 2011-11-03
US20110266633A1
Electricity

Semiconductor device comprising metal gates and semiconductor resistors formed on the basis of a replacement gate approach

#16 | 2011-06-02
US20110127613A1
Electricity

High-K metal gate electrode structures formed by separate removal of placeholder materials using a masking regime prior to gate patterning

#17 | 2011-06-02
US20110127590A1
Electricity

INCREASING STABILITY OF A HIGH-K GATE DIELECTRIC OF A HIGH-K GATE STACK BY AN OXYGEN RICH TITANIUM NITRIDE CAP LAYER

#18 | 2011-05-05
US20110101470A1
Electricity

HIGH-K METAL GATE ELECTRODE STRUCTURES FORMED BY SEPARATE REMOVAL OF PLACEHOLDER MATERIALS IN TRANSISTORS OF DIFFERENT CONDUCTIVITY TYPE

#19 | 2011-03-31
US20110073963A1
Electricity

Superior fill conditions in a replacement gate approach by corner rounding prior to completely removing a placeholder material

#20 | 2010-12-30
US20100330790A1
Electricity

Technique for exposing a placeholder material in a replacement gate approach by modifying a removal rate of stressed dielectric overlayers

#21 | 2010-12-02
US20100301427A1
Electricity

Work function adjustment in high-k metal gate electrode structures by selectively removing a barrier layer

#22 | 2010-09-30
US20100244141A1
Electricity

Method for forming CMOS transistors having metal-containing gate electrodes formed on a high-K gate dielectric material

#23 | 2010-09-02
US20100221906A1
Electricity

Enhancing integrity of a high-k gate stack by confining a metal cap layer after deposition

#24 | 2008-01-03
US20080001191A1
Electricity

Drain/source extension structure of a field effect transistor with reduced boron diffusion

#25 | 2007-07-05
US20070155122A1
Electricity

Trench isolation structure having different stress

#26 | 2007-07-05
US20070155120A1
Electricity

Trench isolation structure for a semiconductor device with reduced sidewall stress and a method of manufacturing the same

InventorID:

41511 ⎘