Aalen
Germany
7
2008-12-04
The entities that hold a legal rights for patent applications filed by inventor Scheible Patrick:
Patrick Scheible from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
#2 | 2008-11-27PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
#3 | 2008-04-24Projection system with compensation of intensity variations and compensation element therefor
#4 | 2005-12-29Monocrystalline optical component with curved surface and multilayer coating
#5 | 2005-10-13Projection objective for immersion lithography
#6 | 2005-07-07Optical component and coating system for coating substrates for optical components
#7 | 2005-03-08Method and coating system for coating substrates for optical components
4160698 ⎘