Michael Liehr

City:

Feldatal

Country:

Germany

Published Applications:

Last publication date:

2008-05-15

Top Assignees for applications by Michael Liehr

The entities that hold a legal rights for patent applications filed by inventor Liehr Michael:

Michael Liehr from Feldatal, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

SYSTEM AND METHOD FOR CONTROL OF ELECTROMAGNETIC RADIATION IN PECVD DISCHARGE PROCESSES

LOW-K DIELECTRIC LAYERS FOR LARGE SUBSTRATES

System and method for power function ramping of microwave liner discharge sources

Magnetron sputtering device, a cylindrical cathode and a method of coating thin multicomponent films on a substrate

InventorID:

4174489 ⎘