Yokohama
Japan
3
2008-08-28
The entities that hold a legal rights for patent applications filed by inventor Hara Daisuke:
Daisuke Hara from Yokohama, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and system for improvement of dose correction for particle beam writers
#2 | 2008-05-22Method and system for lithography simulation and measurement of critical dimensions
#3 | 2008-05-22Method and system for proximity effect and dose correction for a particle beam writing device
4177159 ⎘