Fort Collins, Colorado
United States
11
2008-06-05
The entities that hold a legal rights for patent applications filed by inventor Mahoney Leonard J.:
Leonard J. Mahoney from Fort Collins, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Adaptive controller for ion source
#2 | 2006-08-17Application of in-situ plasma measurements to performance and control of a plasma processing system
#3 | 2006-08-03Diagnostic plasma sensors for endpoint and end-of-life detection
#4 | 2006-03-02Electrically floating diagnostic plasma probe with ion property sensors
#5 | 2005-12-29Diagnostic plasma measurement device having patterned sensors and features
#6 | 2005-10-06Techniques for packaging and encapsulating components of diagnostic plasma measurement devices
#7 | 2005-07-14Sensor array for measuring plasma characteristics in plasma processing environments
#8 | 2005-02-24Wafer probe for measuring plasma and surface characteristics in plasma processing enviroments
#9 | 2005-02-17Wafer probe for measuring plasma and surface characteristics in plasma processing environments
#10 | 2005-02-17Sensor array for measuring plasma characteristics in plasma processing environments
#11 | 2005-01-20Wafer probe for measuring plasma and surface characteristics in plasma processing environments