Edward P. Hammond

City:

Country:

United States

Published Applications:

Last publication date:

2008-08-14

Recent patent applications by Hammond Edward P.

Edward P. Hammond from , US has applied for patents for these inventions. The list has both pending applications and granted patents:

Method of processing a workpiece using a mid-chamber gas distribution plate, tuned plasma flow control grid and electrode

Mid-chamber gas distribution plate, tuned plasma flow control grid and electrode

Plasma etch process for controlling line edge roughness

InventorID:

4201482 ⎘