Rafael Egger

City:

Aalen

Country:

Germany

Published Applications:

Last publication date:

2008-09-04

Top Assignees for applications by Rafael Egger

The entities that hold a legal rights for patent applications filed by inventor Egger Rafael:

Rafael Egger from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Illumination system of a microlithographic exposure apparatus

Illumination system for a microlithgraphic exposure apparatus

Optical illumination system for creating a line beam

Beam reshaping unit for an illumination system of a microlithographic projection exposure apparatus

InventorID:

4231092 ⎘