Michael Trunz

City:

Ellwangen

Country:

Germany

Published Applications:

Last publication date:

2008-09-04

Top Assignees for applications by Michael Trunz

The entities that hold a legal rights for patent applications filed by inventor Trunz Michael:

Michael Trunz from Ellwangen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

OPTICAL ARRANGEMENT AND PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY WITH PASSIVE THERMAL COMPENSATION

Optical arrangement and projection exposure system for microlithography with passive thermal compensation

Arrangement for holding a particle beam apparatus

InventorID:

4245266 ⎘