Pleasanton, California
United States
3
2013-01-03
The entities that hold a legal rights for patent applications filed by inventor Cho Sangjun:
Sangjun Cho from Pleasanton, US has applied for patents for these inventions. The list has both pending applications and granted patents:
In-situ photoresist strip during plasma etching of active hard mask
#2 | 2008-12-25Methods of and apparatus for reducing amounts of particles on a wafer during wafer de-chucking
#3 | 2008-11-27In-situ photoresist strip during plasma etching of active hard mask
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