Tom Choi

City:

Santa Clara, California

Country:

United States

Published Applications:

Last publication date:

2013-01-03

Top Assignees for applications by Tom Choi

The entities that hold a legal rights for patent applications filed by inventor Choi Tom:

Tom Choi from Santa Clara, US has applied for patents for these inventions. The list has both pending applications and granted patents:

In-situ photoresist strip during plasma etching of active hard mask

Methods of and apparatus for reducing amounts of particles on a wafer during wafer de-chucking

In-situ photoresist strip during plasma etching of active hard mask

SEMICONDUCTOR PROCESSING INCLUDING ETCHED LAYER PASSIVATION USING SELF-ASSEMBLED MONOLAYER

Trilayer resist organic layer etch

InventorID:

4258 ⎘